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PulsPlasma® PLANT PulsPlasma® Plant
(Tandem version)
for
plasma assisted chemical vapour
deposition
(PACVD)


Technical data :
Working area : 500 mm diameter
1000 mm height
Pulse current : 60 A
Pulse frequency : < 16 kHz
Input power : 45 kVA


PVA Industrial Vacuum Systems GmbH

Im Westpark 10 - 12, 35435 Wettenberg
Fon: +49 641-68690-490 / Fax: +49 641-68690-498
Deutschland/Germany Geschäftsführer: Volker Lang
Amtsgericht Gießen, HRB 8238, UST-ID: DE 296 062 821
e-mail: Service@plateg.de

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